제품소개

PRODUCT

진공 LTR

Vacuum Wafer Transfer Robot has light-weight, high-speed, low-vibration, especially minimized the sagging at the top of end-effector. It is realized high-speed, optimized configuration(Vacuum, N2 Environment).


  • Glass Size

    3G~8.6G
  • Cleanliness

    Class 1(0.1㎛/cf)
  • Payload

    4~120kg(Including the hand)
Model Arm Type Moving Axes Glass(Wafer) Size Z-Axis Stroke Payload Download
DWG STP JPG PDF
AR-SV3G Single Arm 3 400*500mm 100mm 4kg (Including hand)

D

AR-SV5G Single Arm 3 1500*925mm 300mm 15kg (Including hand)

D

AR-WV5G Dual Arm 4 1100*1300mm 350mm 15kg (Including hand)

D

AR-WV5.5G Dual Arm 4 1300*1500mm 350mm 50kg (Including hand)

D

AR-SV6G Single Arm 3 1500*1850mm - 30kg (Including hand)

D

AR-WV6G Dual Arm 4 1500*1850mm 450mm 50kg (Including hand)

D

AR-WV8.6G Dual Arm 4 2250*2600mm 680mm 120kg (Including hand)

D