Product Introduction

Vacuum WTR

Vacuum Wafer Transfer Robot is the shortest path with Θ axis's limitless rotation. It is realized high-speed, optimized configuration(Vacuum, N2 Environment) and Dry-bearing.



  • Wafer Size

    ~300mm
  • Operating Range

    A/B-Axis 545mm, Θ-Axis 330deg, Z-Axis 50mm
  • Speed

    A/B-Axis 1000mm/s, Θ-Axis 216deg/s, Z-Axis 75mm/s
  • Cleanliness

    Class 1(0.1㎛/cf)
  • Payload

    700g(Including the hand)
Model Arm Type Moving Axes Glass(Wafer) Size Z-Axis Stroke Payload Download
DWG STP JPG PDF
AR-WV300 Dual Arm 4 300mm 50mm 700g (Including hand)

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