PRODUCT
Vacuum Wafer Transfer Robot has light-weight, high-speed, low-vibration, especially minimized the sagging at the top of end-effector. It is realized high-speed, optimized configuration(Vacuum, N2 Environment).
Glass Size
3G~8.6GCleanliness
Class 1(0.1㎛/cf)Payload
4~120kg(Including the hand)